Faculty of Applied Science & Engineering, University of Toronto
AP²D Labs Advanced Photonic & Photovoltaic Devices
AP²D Labs

Capabilities

Facilities

Analytical and synthesis tools for thin-film materials, optoelectronics, and device characterization.

Analytical

Characterization

Photovoltaic & optoelectronic

  • IV / spectral response system (Neonsee)
  • EQE system (Enli)
  • Micro PCD (Semilab)
  • Sinton lifetime tester / Suns-Voc (Sinton)
  • Vacuum-cryostat optoelectrical characterization
  • Photoluminescence facility (Ar and other lasers, goniometer)
  • Optoelectronic characterization facility
  • Light soaking / aging / exposure system

Electrical & materials metrology

  • Probe station with Keithley 4200 SMUs (MPI)
  • Keithley electrical characterization station
  • Nanometrics Hall characterization station
  • 2/4-point conductivity measurement probe
  • Profilometer (Tencor)

Optical spectroscopy & imaging

  • Ex-situ spectroscopic ellipsometer (Sopra)
  • UV-Vis spectrophotometer (Perkin Elmer Lambda)
  • Multiwavelength Raman spectroscopy (Renishaw)
  • Optical microscope (Leica)
  • Optical microscope with high-speed camera (Leica)

Synthesis

Deposition & processing

PVD & cluster tools

  • Multi-target DC/RF sputtering (4-target, co-sputter, reactive, heated substrate to 250 °C, load-lock)
  • E-beam / thermal evaporation (Kurt J. Lesker, 4-pocket, cooled substrate, load-lock)
  • AIMS — Advanced Integrated Materials Synthesis (Mantis; PVD nanogen, core-shell, size selection, sputtering, soft e-beam, GLAD; CVD atomizer/ionizer)
  • Gen 3.1 RF-PECVD / sputter cluster (MVS; 8-port, load-lock, annealing, a-Si i/n/p, 156 mm platform)

PECVD systems

  • Gen 1.2 DC/SF-RF PECVD (Torrovap; a-C, DLC, polymeric, metallo-organic)
  • Gen 2.1 DC/SF PECVD (Komag / Torrovap; multi-grid a-Si intrinsic & doped)
  • Gen 2.2 RF PECVD (Torrovap; multi-grid a-Si, H2/D2 plasma)
  • Gen 2.3 DC/SF-RF PECVD (Torrovap; in-situ diagnostics, hydrocarbon, diamond, graphene)

Catalysis & patterning

  • HPTEC, heterogeneous photo-thermo-electro-catalysis facility
  • Laser micro-machining system (Newport / Optek)
  • Ozone / oxygen ambient oxidation system

Wet processing

  • Spinner (Laurell)
  • Wet bench
  • Hot plate

Interested in using our equipment?

If you would like to use lab equipment for a project, collaboration, or measurement, get in touch and we can discuss what is possible.

Contact us Email: nazir.kherani “at” utoronto.ca